China successfully developed nano-grating samples

Xinhuanet Beijing, November 19th (Reporter Zhu Liyi) A research team composed of China Institute of Metrology, Tongji University and National University of Defense Technology, after three years of scientific research, successfully developed one-dimensional chromium atomic nanometers for the first time in China. Raster template. A few days ago, this subject passed the acceptance and appraisal organized by the Science and Technology Department of the General Administration of Quality Supervision, Inspection and Quarantine.

According to the relevant person in charge of the China Institute of Metrology, in recent years, China's nanotechnology industry has developed rapidly, and the value traceability problem has seriously hindered the development of China's nanotechnology industry. Nearly 10,000 nanometer measuring instruments imported each year cannot be tested for quality. Have to rely on foreign models for calibration. Even so, the situation of the different values ​​of China's nano-industry has not been fundamentally resolved. Due to the different traceability channels, the linewidth values ​​of the two large integrated circuit companies in Wuxi are 10% different.

In order to solve the above problems, the scientific research group led by the Quantum Benchmarking Laboratory of the Institute of Electrical Quantums of the China Institute of Metrology has undertaken the “Eleventh Five-Year” National Science and Technology Support Program in 2006 – “The Key to the Cold Atom Nanoscale Measurement Benchmark” Technical research." After three years of hard work, the research team mastered the theory and technology of chromium atom deposition nano-grating, independently established a high-vacuum atomic deposition experimental device, successfully developed a one-dimensional nano-scale grating standard template, and passed the metrological verification of professional institutions.

It is understood that the one-dimensional standard nano-grating template is one of the five nano-standard templates specified by the International Bureau of Metrology. Its successful development has filled the gap in China's research on nanometer-based reference materials, and its technical indicators have reached the international advanced level. The achievement of this achievement has made China one of the few countries to master atomic grating deposition technology, which will fundamentally solve the problem of traceability and calibration of nanometer measurement instruments in China, and change the current status of nanometer measurement in China.

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